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METHOD FOR THE PRODUCTION OF SILICA-BASED OR SILICA-BASED THICK GLASS-LIKE FILMS BY THE SOL-GEL PROCESS AND THICK FILMS PRODUCED THEREOF
METHOD FOR THE PRODUCTION OF SILICA-BASED OR SILICA-BASED THICK GLASS-LIKE FILMS BY THE SOL-GEL PROCESS AND THICK FILMS PRODUCED THEREOF
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机译:用溶胶-凝胶法生产硅基或硅基厚玻璃膜的方法及其生产的厚膜
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摘要
A sol-gel process allowing preparation, on a substrate, of glassy films of silicon oxide or mixed oxides based on silicon oxide, of thickness above 1 micrometer, generally between 2 and 20 micrometers and characterized by absence of defects, that turn out to be particularly suitable as waveguides in flat optical devices.
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