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System and method for detecting hydride gases at low concentrations and in the presence of varying humidity levels
System and method for detecting hydride gases at low concentrations and in the presence of varying humidity levels
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机译：用于在低浓度和湿度变化的情况下检测氢化物气体的系统和方法
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摘要
The present invention provides a method and system for detecting low levels of arsine in the presence of varying humidity levels. The present invention incorporates a moisture filter that absorbs and desorbs water as humidity levels change onto an arsine detector. This moisture filter may take the form of a solid tablet formed of a porous, hydrophilic material with a series of small holes therein. The walls of the holes absorb and desorb water as the humidity changes while permitting arsine to pass through unobstructed. Since the electrochemical current responds to the change in the water but the oxidation of arsines responds to the absolute concentration, the effect is that the signal to noise ration is improved by the presence of the moisture filter.
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