Reduced particle contamination manufacturing and packaging for reticles

• 1. 一种减少硅片颗粒污染的机械手 [P] . 中国专利： CN109411403B . 2021.07.02
• 2. 一种藉由偏压电压来减少颗粒污染的装置和方法 [P] . 中国专利： CN112614767A . 2021-04-06
• 3. Reduced particle contamination manufacturing and packaging for reticles [P] . 美国专利： US7368020B2 . 2008-05-06

  机译： 减少掩​​模版的颗粒污染制造和包装

• 4. Reduced particle contamination manufacturing and packaging for reticles [P] . 美国专利： US6732746B2 . 2004-05-11

  机译： 减少掩​​模版的颗粒污染制造和包装

• 5. Reduced particle contamination manufacturing and packaging for reticles [P] . 美国专利： US6715495B2 . 2004-04-06

  机译： 减少掩​​模版的颗粒污染制造和包装

• 1. Reducing resin content and board density without adversely affecting the mechanical properties of particleboard through controlling particle size [J] . Mohammad Arabi, Mehdi Faezipour, Heydar Gholizadeh 林业研究（英文版） . 2011,第004期
• 2. Strategies for reducing particle defects in ALD TiN and RFPVD Ti processes CFM: Contamination free manufacturing [C] . Aditya Kumar, Bhavyen Patel, Jean-Baptiste Laloe Annual SEMI Advanced Semiconductor Manufacturing Conference . 2017
• 3. Reducing Levels of Medical Device Contamination through Package Redesign, Seal Geometry and Opening Technique [D] . Perez, Paula 2018
• 4. Meat Processing Plant Microbiome and Contamination Patterns of Cold-Tolerant Bacteria Causing Food Safety and Spoilage Risks in the Manufacture of Vacuum-Packaged Cooked Sausages [O] . Jenni Hultman, Riitta Rahkila, Javeria Ali, 2015
• 5. Photoluminescence-based detection of particle contamination on extreme ultraviolet reticles [O] . Gao, An, Rizo, P.J., Scaccabarozzi, L., 2015

• 1. iMytilus galloprovincialis/ias Mussel Watch for Butyltins, Tin, Copper and Zinc Contamination, from Antifouling Paint Particles, in West Algerian Coastal Waters [J] . Zoubida El Hadj ,Zitouni Boutiba ,Boucif Belbachir . 环境保护（英文） . 2012,第9期
• 2. High-temperature Oxidation Resistant Coatings Composed of YSZ Particles Packaged by Nano-Al_2O_3 Film [J] . Y. D. HE C. REN K. ZHANG . 中国腐蚀与防护学报 . 2009,第4期
• 3. Se-Bearing Colloidal Particles Produced by Sulfate-Reducing Bacteria and Sulfide-Oxidizing Bacteria: TEM Study [J] . Huifang Xu ,Larry L. Barton . 微生物学（英文） . 2013,第2期
• 4. Study of “Radiation Effects of Nuclear High Energy Particles” on Electronic Circuits and Methods to Reduce Its Destructive Effects [J] . Omid Zeynali ,Daryoush Masti ,Maryam Nezafat . 现代物理（英文） . 2011,第12期
• 5. 实施绿色包装减少包装废弃物对环境的污染 [C] . 李军 ,石孝洪 ,叶宏 . 第八届全国包装工程会议录 . 2002
• 6. 减少180nm节点晶片表面污染物颗粒的优化研究 [A] . 魏红建 . 2013