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METHOD OF INSPECTION-DISCRIMINATING NANO-STRUCTURED HYPER-FINE RAW MATERIAL, SYSTEM THEREFOR, AND FUNCTIONAL NANO-STRUCTURED HYPER-FINE RAW MATERIAL PRODUCED BY THE SYSTEM
METHOD OF INSPECTION-DISCRIMINATING NANO-STRUCTURED HYPER-FINE RAW MATERIAL, SYSTEM THEREFOR, AND FUNCTIONAL NANO-STRUCTURED HYPER-FINE RAW MATERIAL PRODUCED BY THE SYSTEM
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机译：区分纳米结构的超细原材料的检验方法，系统以及系统生产的功能纳米结构的超细原材料
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摘要
PROBLEM TO BE SOLVED: To provide an integrated inspection-judging system for nano structure by a TEM and an EDX capable of analyzing a nano-structured hyper-fine raw material of high purity quickly and precisely at 1.8 Å of fixed resolution, to provide the raw material having a high function of which the internal constitution ad the structure, or the thickness of a film and the interstitial distance of a particle are accurately measured by the system, to provide an oxide layer film formed uniformly and close- contactingly on an ultrafine particle interface, and to protect an organic compound or an organism from damage such as structural destruction and crystal transition. ;SOLUTION: At least one layer, or a plurality of layers when necessary, of an ultra-thin oxide layer is formed on the nano-structured hyper-fine raw material, and an electron-resistant beam is imparted to conduct precise discrimination for the nano- structured hyper-fine raw material. A server connected to an exclusive line or a PHS line is connected to the TEM, and an analytical data is made thereby to correspond immediately to a manufacturing process for the nano-structured hyper-fine raw material, so as to solve a problem on production and to determine an end point of reaction for the raw material.;COPYRIGHT: (C)2004,JPO
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