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Whether or not leakage ON test method and the leakage test equipment and the airtightness structure null tracer gas for the leakage test equipment which use
Whether or not leakage ON test method and the leakage test equipment and the airtightness structure null tracer gas for the leakage test equipment which use
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机译：使用的泄漏测试设备的泄漏ON测试方法和泄漏测试设备以及气密性结构零示踪气体
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摘要
PROBLEM TO BE SOLVED: To perform a leakage test in a short time by exhausting air from the inside of a vacuum chamber in a short time without using a vacuum pump of large displacement even if an inspection object work is arranged in the vacuum chamber of the large volume.;SOLUTION: This leakage testing device is provided with an arranging process for arranging sealed structures 10, 20, 30, 40 and 50 by leaving a part for housing the inspection object work X in the vacuum chamber 60, a housing process for housing the inspection object work X in the vacuum chamber 60 provided with the sealed structures 10, 20, 30, 40 and 50, a pressure reducing process for reducing pressure of the inside of the vacuum chamber 60 more than the inspection object work X by the vacuum pump 70 and a communicating process for communicating tracer gas leaked out of the inspection object work X with a gas detector 65. Since a space in the vacuum chamber 60 reduces by the sealed structures 10, 20, 30, 40 and 50, the inside of the vacuum chamber can be exhausted in a short time.;COPYRIGHT: (C)2001,JPO
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