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MICROACTUATOR ARRAY, MICROACTUATOR SYSTEM USING THE SAME, OPTICAL SWITCH ARRAY AND OPTICAL SWITCHING SYSTEM

机译：微致动器阵列，使用相同的微致动器系统，光开关阵列和光开关系统

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摘要

PPROBLEM TO BE SOLVED: To decrease the number of wiring which are drawn out to outside without mounting an address circuit or the like. PSOLUTION: The fixed electrode 128 of capacitors C11, C12 and C13 which respective actuators form is electrically connected in common to the terminal CD1 of a first terminal group. The fixed electrode 128 of the capacitors C21, C22 and C23 is electrically connected in common to the terminal CD2 of the first terminal group. The fixed electrode 128 of the capacitors C31, C32 and C33 is electrically connected in common to the terminal CD3 of the first terminal group. The movable electrode of the capacitors C11, C21 and C31 is electrically connected in common to the terminal CU1 of a second terminal group. The movable electrode of the capacitors C12, C22 and C32 is electrically connected in common to the terminal CU2 of the second terminal group. The movable electrode of the capacitors C13, C23 and C33 is electrically connected in common to the terminal CU3 of the second terminal group. PCOPYRIGHT: (C)2004,JPO&NCIPI

机译：

要解决的问题：在不安装地址电路等的情况下，减少引出到外部的布线数量。

解决方案：分别由致动器形成的电容器C11，C12和C13的固定电极128共同电连接到第一端子组的端子CD1。电容器C21，C22和C23的固定电极128共同电连接到第一端子组的端子CD2。电容器C31，C32和C33的固定电极128共同电连接到第一端子组的端子CD3。电容器C11，C21和C31的可动电极共同电连接到第二端子组的端子CU1。电容器C12，C22和C32的可动电极共同电连接到第二端子组的端子CU2。电容器C13，C23和C33的可动电极共同电连接到第二端子组的端子CU3。

版权：（C）2004，日本特许厅和日本国家唱片公司展开▼

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公开/公告号JP2004184564A

专利类型
公开/公告日2004-07-02

原文格式PDF
申请/专利权人 NIKON CORP;
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申请/专利号JP20020349313
发明设计人 AKAGAWA KEIICHI;
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申请日2002-12-02
分类号G02B26/08;B81B3/00;B81B7/02;B81B7/04;H02N1/00;
国家 JP
入库时间 2022-08-21 23:29:13

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