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OPTICAL SYSTEM INSPECTION APPARATUS, OPTICAL SYSTEM INSPECTION METHOD, OPTICAL SYSTEM UNIT AND OPTICAL DEVICE
OPTICAL SYSTEM INSPECTION APPARATUS, OPTICAL SYSTEM INSPECTION METHOD, OPTICAL SYSTEM UNIT AND OPTICAL DEVICE
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机译:光学系统检查装置,光学系统检查方法,光学系统单元和光学装置
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摘要
PROBLEM TO BE SOLVED: To easily detect the relative positions of optical elements and a light beam, and to adjust and inspect the whole device having an optical system without installing a light receiving means in the optical path of a light beam even when a highly directional light source is used.;SOLUTION: An optical system inspection apparatus is applied for an optical system having optical elements for focusing or guiding a light beam generated from a light source such as a laser diode on a predetermined position. The optical system inspection apparatus is provided with two-dimensional CCD cameras 8a and 8b which acquire an image of an fθ lens 3 and an image of the scattered light of the light beam which is scattered on a predetermined face of the fθ lens 3 from a predetermined direction.;COPYRIGHT: (C)2004,JPO&NCIPI
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