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MEMS ELEMENT AND OPTICAL ATTENUATOR, OPTICAL SWITCH, AND OPTICAL SCANNER ALL USING THE SAME

机译:MEMS元件和光学衰减器,光学开关和光学扫描仪都使用相同的元件

摘要

PROBLEM TO BE SOLVED: To control a MEMS element with low voltage in the MEMS element for optical control.;SOLUTION: A substrate 31 is provided with supporting parts 32a and 32b, and a diaphragm actuator 35 is freely vertically movably held. An optical mirror 39 is connected to it through a hinge 42. The optical mirror 39 is held freely turnably by the hinges 40 and 41 parallel to the boundary part with the diaphragm actuator. In such a manner, by attracting the diaphragm actuator 35 by electrostatic attractive force, the optical mirror 39 is tilted.;COPYRIGHT: (C)2004,JPO
机译:解决的问题:在用于光学控制的MEMS元件中以低电压控制MEMS元件;解决方案:基板31设有支撑部分32a和32b,并且膜片致动器35自由地垂直移动。光学镜39通过铰链42连接到其上。光学镜39通过铰链40和41可自由转动地保持,该铰链40和41平行于膜片致动器的边界部分。以这种方式,通过静电引力吸引膜片致动器35,使光学镜39倾斜。;版权:(C)2004,JPO

著录项

  • 公开/公告号JP2004085870A

    专利类型

  • 公开/公告日2004-03-18

    原文格式PDF

  • 申请/专利权人 SUN TEC KK;

    申请/专利号JP20020246577

  • 申请日2002-08-27

  • 分类号G02B26/08;B81B3/00;G02B26/10;

  • 国家 JP

  • 入库时间 2022-08-21 23:34:28

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