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MEMS ELEMENT AND OPTICAL ATTENUATOR, OPTICAL SWITCH, AND OPTICAL SCANNER ALL USING THE SAME
MEMS ELEMENT AND OPTICAL ATTENUATOR, OPTICAL SWITCH, AND OPTICAL SCANNER ALL USING THE SAME
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机译:MEMS元件和光学衰减器,光学开关和光学扫描仪都使用相同的元件
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摘要
PROBLEM TO BE SOLVED: To control a MEMS element with low voltage in the MEMS element for optical control.;SOLUTION: A substrate 31 is provided with supporting parts 32a and 32b, and a diaphragm actuator 35 is freely vertically movably held. An optical mirror 39 is connected to it through a hinge 42. The optical mirror 39 is held freely turnably by the hinges 40 and 41 parallel to the boundary part with the diaphragm actuator. In such a manner, by attracting the diaphragm actuator 35 by electrostatic attractive force, the optical mirror 39 is tilted.;COPYRIGHT: (C)2004,JPO
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