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SOLID CARBON BASED EVAPORATION SOURCE, EVAPORATION SOURCE, CARBON BASED THIN FILM DEPOSITION METHOD, AND CARBON BASED THIN FILM DEPOSITION SYSTEM
SOLID CARBON BASED EVAPORATION SOURCE, EVAPORATION SOURCE, CARBON BASED THIN FILM DEPOSITION METHOD, AND CARBON BASED THIN FILM DEPOSITION SYSTEM
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机译：固体碳蒸发源，蒸发源，碳薄膜沉积方法和碳薄膜沉积系统
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摘要
PROBLEM TO BE SOLVED: To provide a solid carbon based evaporation source which does not require not only equipment for a solid carbon based vapor deposition source but also equipment for the other evaporation source at the time when a plurality of thin film layers including carbon based thin films are stacked to deposit on a substrate.;SOLUTION: The solid carbon based evaporation source is obtained by providing a part of the evaporation face in a solid carbon based evaporation source with a recessed part for the other evaporation source.;COPYRIGHT: (C)2005,JPO&NCIPI
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