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lewis base adducts of anhydrous mononuclear tris (beta diketonat) bismuth compounds for the application of bismuth containing layers and processes for their manufacture
lewis base adducts of anhydrous mononuclear tris (beta diketonat) bismuth compounds for the application of bismuth containing layers and processes for their manufacture
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机译:用于含铋层的无水单核三(β二酮)铋化合物的路易斯碱加合物及其制造方法
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摘要
A solvent composition useful for liquid delivery MOCVD, comprising toluene and a Lewis base, wherein toluene is present at a concentration of from about 75% to about 98% by volume, based on the total volume of toluene and the Lewis base. Such solvent composition is usefully employed to dissolve or suspend precursors therein for liquid delivery MOCVD, e.g., MOCVD of ferroelectric material films such as SBT.
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