首页> 外国专利> Carbon nanotube synthesis comprises catalytically depositing carbon in the gas phase on a catalytic layer formed on a support element using an ion beam to modify physical, chemical and/or conducting properties

Carbon nanotube synthesis comprises catalytically depositing carbon in the gas phase on a catalytic layer formed on a support element using an ion beam to modify physical, chemical and/or conducting properties

机译：碳纳米管合成包括使用离子束将气相中的碳催化沉积在支撑元件上形成的催化层上，以改变物理，化学和/或导电性能

页面导航

摘要
著录项
相似文献

摘要

Process for synthesizing carbon nanotubes comprises catalytically depositing carbon in the gas phase on a catalytic layer formed on a support element. An ion beam is used to modify the physical, chemical and/or conducting properties of the nanotubes before, during and/or after formation of the nanotubes. Preferred Features: The catalytic layer is 10-500, preferably 30-60 nm thick. The ion beam is guided using a deviating element and/or a focussing element and is controlled using a stencil mask. The ion beam contains particles made from Co, Ni, Fe, He, H, Ar, Xe, Kr, O, or a dopant made from As, P, B, Ag, Au, Pt, Pd and their mixtures. The catalytic layer is a metal layer.

机译：合成碳纳米管的方法包括将气相中的碳催化沉积在支撑元件上形成的催化层上。离子束用于在纳米管形成之前，期间和/或之后改变纳米管的物理，化学和/或导电性质。优选的特征：催化层为10-500nm，优选30-60nm厚。使用偏转元件和/或聚焦元件来引导离子束，并使用模板掩模来控制离子束。离子束包含由Co，Ni，Fe，He，H，Ar，Xe，Kr，O制成的颗粒，或由As，P，B，Ag，Au，Pt，Pd及其混合物制成的掺杂剂。催化层是金属层。

著录项

公开/公告号DE10257025A1

专利类型
公开/公告日2003-06-26

原文格式PDF
申请/专利权人 ELECTROVAC FABRIKATION ELEKTROTECHNISCHER SPEZIALARTIKEL GES.M.B.H.;IMS-IONEN MIKROFABRIKATIONS SYSTEME GES.M.B.H. WIEN;
展开▼

申请/专利号DE2002157025
发明设计人 STENGL GERHARD;LOESCHNER HANS;TANG XINHE;MAUTHNER KLAUS;PLATZGUMMER ELMAR;HAMMEL ERNST;
展开▼

申请日2002-12-06
分类号B82B3/00;C23C16/56;
国家 DE
入库时间 2022-08-21 23:41:49

相似文献

专利
外文文献
中文文献