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Tunable narrowband filter for IR spectral measurements based on electrostatically-driven micromechanical Fabry-Perot interferometer
Tunable narrowband filter for IR spectral measurements based on electrostatically-driven micromechanical Fabry-Perot interferometer
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机译:基于静电驱动微机械法布里-珀罗干涉仪的可调谐窄带滤光片,用于红外光谱测量
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摘要
The narrowband filter has 4 silicon wafers (1,2,3,4) located in respective planes, structured via a volume micromechanical method, for providing a mirror holder (5) and a movable mirror (7) supported by flexure springs, the resonator gap provided by a dielectric layer stack (12) between the movable mirror and a fixed mirror (9). The electrode gap between the drive electrodes (10) is greater than the resonator gap, the inside surfaces of the wafers provided with the drive electrodes having polysilicon and silicondioxide dielectric mirrors, their outside surfaces having anti-reflection layers (15).
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