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METHOD FOR PRODUCING POROUS INSULATING COMPOUND (ALTERNATIVES), COMPOSITE USED FOR PRODUCING POROUS INSULATING MATERIAL (ALTERNATIVES), AND SEMICONDUCTOR DEVICE
METHOD FOR PRODUCING POROUS INSULATING COMPOUND (ALTERNATIVES), COMPOSITE USED FOR PRODUCING POROUS INSULATING MATERIAL (ALTERNATIVES), AND SEMICONDUCTOR DEVICE
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机译：制备多孔绝缘化合物（替代物）的方法，用于制备多孔绝缘材料的复合物（替代物）和半导体装置
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摘要
FIELD: manufacture of insulating materials. SUBSTANCE: method includes following steps: production of at least one composite organic consumable material/dielectric material incorporating at least one consumable material and at least one dielectric material and removal of at least one organic consumable material from a at least one composite organic consumable material/dielectric material to form pores in at least one dielectric material. Description is also given of compound used for producing porous insulating material incorporating heat-activated pore-forming consumable material and dielectric material. As an alternative compound used for producing porous insulating material has at least one pore-forming organic consumable material and at least one dielectric material, at least one pore-forming material being of norbornene type polymer. EFFECT: reduced dielectric constant of insulating material characterized in uniform distribution of its pores having relatively equal diameter. 53 cl, 3 dwg, 1 tbl
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