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An electric actuator having a cylindrical linear motion coil and an annular rotary motion coil, an actuator unit including the actuator and the measurement system, and a machine including the actuator or the actuator unit.
An electric actuator having a cylindrical linear motion coil and an annular rotary motion coil, an actuator unit including the actuator and the measurement system, and a machine including the actuator or the actuator unit.
The electronic actuator 1 of the present invention comprises two actuator sections capable of linear movement with respect to one another along the actuator axis 1a and rotatable about the actuator axis, wherein the first actuator section 1 has a coil section. And the second actuator section 3 constitutes a permanent magnet portion for cooperating with the coil portion through the air gap. The coil portion comprises a cylindrical linear motion coil 9 and an annular rotary motion coil 7 disposed on the magnetically conductive yoke 5 and coaxial with the actuator axis. The permanent magnet portion includes an annular magnet 11 coaxial with the actuator axis to cooperate with both the linear motion coil and the rotary motion coil. The magnet has radial magnetization B which is blocked by the annular segment 13. The magnetically conductive yoke has a center core 5a in which linear motion coils are arranged around it and a shell 5b in which rotational motion coils are disposed thereon. The core and shell define the space in which the annular magnet is disposed, and the magnetically conductive yoke includes a bridge 5c connecting the central core and the shell.
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