Method of synthesizing carbon nanotubes using plasma-enhanced chemical vapor deposition

• 1. 在等离子体增强化学气相沉积系统中高温下使用压缩应力或拉伸应力处理晶片的方法和装置 [P] . 中国专利： CN113972162A . 2022-01-25
• 2. 在等离子体增强化学气相沉积系统中于高温下使用压缩应力或拉伸应力处理晶片的方法和装置 [P] . 中国专利： CN106575634A . 2017-04-19
• 3. Method of synthesizing carbon nanotubes using plasma-enhanced chemical vapor deposition [P] . 韩国专利： KR20010049453A . 2001-06-15

  机译： 使用等离子体增强化学气相沉积合成碳纳米管的方法

• 4. Supported metal catalyst for synthesizing carbon nanotubes by low-temperature thermal chemical vapor deposition and method of synthesizing carbon nanotubes using the same [P] . 美国专利： US2003181328A1 . 2003-09-25

  机译： 用于通过低温热化学气相沉积合成碳纳米管的负载金属催化剂以及使用该催化剂的合成碳纳米管的方法

• 5. FLOATING CATALYST CHEMICAL VAPOR DEPOSITION METHOD OF SYNTHESIZING CARBON NANOTUBES AND CARBON NANOFIBERS [P] . MY154815A . 2015-07-31

  机译： 合成碳纳米管和碳纳米粒子的浮选催化剂化学气相沉积方法

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