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Deposition process of the film of hydrogenated amorphous carbon film, and article coated with hydrogenated amorphous carbon film of hydrogenated amorphous carbon

机译:氢化非晶碳膜的沉积工艺,以及涂覆有氢化非晶碳的氢化非晶碳膜的制品

摘要

"The process of deposition of hydrogenated amorphous carbon film, film of hydrogenated amorphous carbon and article coated with the film of hydrogenated amorphous carbon.The present invention relates to a process enhanced deposition of a film of hydrogenated amorphous carbon.More specifically, a process improved espirramento cathode of low temperature, low power and low vacuum.The invention relates to the film obtained by such process and articles containing amorphous hydrogenated carbon film coating.
机译:沉积氢化非晶碳膜的方法,氢化非晶碳膜和涂覆有氢化非晶碳膜的制品。本发明涉及增强氢化非晶碳膜的沉积的方法。低温,低功率和低真空的改进的电子气阴极。本发明涉及通过这种方法获得的膜以及包含无定形氢化碳膜涂层的制品。

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