首页>
外国专利>
Deposition process of the film of hydrogenated amorphous carbon film, and article coated with hydrogenated amorphous carbon film of hydrogenated amorphous carbon
Deposition process of the film of hydrogenated amorphous carbon film, and article coated with hydrogenated amorphous carbon film of hydrogenated amorphous carbon
展开▼
机译:氢化非晶碳膜的沉积工艺,以及涂覆有氢化非晶碳的氢化非晶碳膜的制品
展开▼
页面导航
摘要
著录项
相似文献
摘要
"The process of deposition of hydrogenated amorphous carbon film, film of hydrogenated amorphous carbon and article coated with the film of hydrogenated amorphous carbon.The present invention relates to a process enhanced deposition of a film of hydrogenated amorphous carbon.More specifically, a process improved espirramento cathode of low temperature, low power and low vacuum.The invention relates to the film obtained by such process and articles containing amorphous hydrogenated carbon film coating.
展开▼