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Coordinate transforming method in position setting means of observation device and observation device equipped with coordinate transforming means
Coordinate transforming method in position setting means of observation device and observation device equipped with coordinate transforming means
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机译:观察装置的位置设定装置中的坐标变换方法以及具备该坐标变换装置的观察装置
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摘要
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摘要
The present invention allows a rapid and easy transformation of coordinates for position designation between first and second observation apparatus having means for designating positions in a sample. The present invention includes the steps of setting at least three observation points in random positions in the sample, setting the sample marked for determining the relative positions of the sample and a sample base on the first and second observation apparatus so as to read the coordinates of the above-mentioned observation points, and determining coordinate transformation formulas by calculating a, b, c, and d of below-described formulas (1) by letting one of the above-mentioned three observation points serve as temporary origins, correcting the coordinates of the other two based on the above-mentioned temporary origins, and substituting the corrected coordinates into the formulas (1).;
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