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Method of fabricating a distributed Bragg reflector by controlling material composition using molecular beam epitaxy
Method of fabricating a distributed Bragg reflector by controlling material composition using molecular beam epitaxy
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机译:通过使用分子束外延控制材料组成来制造分布式布拉格反射器的方法
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摘要
A distributed Bragg reflector for a vertical cavity surface emitting laser has a semiconductor material system including the elements aluminum, gallium, arsenic, and antimony. Accurate control of the composition of the semiconductor material system must be maintained to result in a distributed Bragg reflector suitable for use in a VCSEL. A method of fabricating the distributed Bragg reflector includes calibrating the incorporation of at least one of the elements into the material system as different semiconductor materials are grown on a substrate.
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