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MANUFACTURING METHOD OF THIN FePt MAGNETIC THIN FILM
MANUFACTURING METHOD OF THIN FePt MAGNETIC THIN FILM
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机译：薄FePt磁性薄膜的制造方法
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摘要
PROBLEM TO BE SOLVED: To obtain an PePt phase of L10 structure regularized immediately after the film is formed without high temperature treatment at a temperature of 600°C or higher after the film is formed and without adding a third element to obtain large coercive force at a low temperature.;SOLUTION: The FePt phase of L10 structure regularized right after forming the film is obtained by forming the film by a sputtering method while heating a substrate at a temperature of 200-300°C, and making the regularization advance for the FePt phase by the surface dispersion of atoms occurring on the surface during the film formation.;COPYRIGHT: (C)2003,JPO
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