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CONICAL DIFFRACTION OBLIQUE-INCIDENCE SPECTROSCOPE, AND DIFFRACTION GRATING FOR THE SPECTROSCOPE
CONICAL DIFFRACTION OBLIQUE-INCIDENCE SPECTROSCOPE, AND DIFFRACTION GRATING FOR THE SPECTROSCOPE
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机译:圆锥形衍射斜入射光谱,以及该光谱的衍射光栅
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摘要
PROBLEM TO BE SOLVED: To provide a diffraction grating designed to prevent diffraction efficiency from being lowered by a shadow generated by a grating groove, and designed to reduce extremely an aberration caused by conical diffraction, and a conical diffraction oblique-incidence spectroscope provided with the diffraction grating.;SOLUTION: In this diffraction grating spectroscope provided with a converged beam generating means (concave mirror 2) for converting a dispersed beam from a light source or an inlet slit 1 into a converged beam, and the diffraction grating (plane diffraction grating 3) arranged on an optical path ranging over from the light source to a focal point of the converged beam, and for conducting wavelength scanning by turning the diffraction grating around an axis determined in parallel to a grating groove direction of a grating face thereof, an expansion coefficient for a groove function of a series expansion showing a groove pattern of the diffraction grating is determined to make all of a rotating axis (y-axis) of the diffraction grating, an incident main beam and a diffraction main beam coplanar, and to bring a value of an expansion coefficient of an optical path function for expressing the focal point of a spectroscopic system including the diffraction grating into substantially zero in at least one wavelength within a wavelength range for conducting the wavelength scanning.;COPYRIGHT: (C)2003,JPO
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