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CONICAL DIFFRACTION OBLIQUE-INCIDENCE SPECTROSCOPE, AND DIFFRACTION GRATING FOR THE SPECTROSCOPE

机译:圆锥形衍射斜入射光谱,以及该光谱的衍射光栅

摘要

PROBLEM TO BE SOLVED: To provide a diffraction grating designed to prevent diffraction efficiency from being lowered by a shadow generated by a grating groove, and designed to reduce extremely an aberration caused by conical diffraction, and a conical diffraction oblique-incidence spectroscope provided with the diffraction grating.;SOLUTION: In this diffraction grating spectroscope provided with a converged beam generating means (concave mirror 2) for converting a dispersed beam from a light source or an inlet slit 1 into a converged beam, and the diffraction grating (plane diffraction grating 3) arranged on an optical path ranging over from the light source to a focal point of the converged beam, and for conducting wavelength scanning by turning the diffraction grating around an axis determined in parallel to a grating groove direction of a grating face thereof, an expansion coefficient for a groove function of a series expansion showing a groove pattern of the diffraction grating is determined to make all of a rotating axis (y-axis) of the diffraction grating, an incident main beam and a diffraction main beam coplanar, and to bring a value of an expansion coefficient of an optical path function for expressing the focal point of a spectroscopic system including the diffraction grating into substantially zero in at least one wavelength within a wavelength range for conducting the wavelength scanning.;COPYRIGHT: (C)2003,JPO
机译:解决的问题:提供一种衍射光栅,该衍射光栅设计为防止由于光栅槽产生的阴影而降低衍射效率,并且设计为最大程度地减小由圆锥形衍射引起的像差,并且该圆锥形衍射镜具有解决方案:在这种衍射光栅光谱仪中,配备有会聚光束产生装置(凹面镜2),用于将来自光源或入口狭缝1的色散光束转换为会聚光束,以及衍射光栅(平面衍射光栅) 3)被布置在从光源到会聚光束的焦点的范围内的光路上,并且通过绕着平行于其光栅面的光栅凹槽方向确定的轴旋转衍射光栅来进行波长扫描,表示衍射光栅的沟槽图案的系列扩展的沟槽函数的扩展系数为确定使衍射光栅的所有旋转轴(y轴),入射主光束和衍射主光束共面,并使光程函数的膨胀系数的值表示光焦度。分光镜系统,包括在进行波长扫描的波长范围内的至少一个波长内的衍射光栅基本为零。; COPYRIGHT:(C)2003,JPO

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