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OPTICAL WAVEGUIDE COMPONENT, METHOD FOR MANUFACTURING OPTICAL WAVEGUIDE COMPONENT, METHOD FOR MARKING OPTICAL WAVEGUIDE COMPONENT, AND METHOD FOR PROCESSING OPTICAL WAVEGUIDE COMPONENT
OPTICAL WAVEGUIDE COMPONENT, METHOD FOR MANUFACTURING OPTICAL WAVEGUIDE COMPONENT, METHOD FOR MARKING OPTICAL WAVEGUIDE COMPONENT, AND METHOD FOR PROCESSING OPTICAL WAVEGUIDE COMPONENT
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机译：光学波导组件，制造光学波导组件的方法，标记光学波导组件的方法以及处理光学波导组件的方法
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摘要
PROBLEM TO BE SOLVED: To provide a method for manufacturing an optical waveguide component in a few processes by detecting the surface of the optical waveguide component by a simple method, and to provide a method for marking the surface of the optical waveguide component. ;SOLUTION: A femtosecond laser from a light source 1 is condensed near the surface of a substrate 5, a work, in order to cause ablation on the surface of the substrate 5. The traces of the ablation are used as a reference of a substrate 5 surface, and a laser beam is emitted and condensed on a desired depth to continuously form a region having a high refractive index in the substrate so as to form the optical waveguide. The laser beam is further emitted and condensed on the optical waveguide component to cause ablation, and the marking for positioning and writing of characters on the surface of the optical waveguide component is carried out by this ablation.;COPYRIGHT: (C)2003,JPO
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