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MEASURING METHOD OF CONCENTRATION OF MOLECULAR CONTAMINATION AND MEASURING APPARATUS THEREFOR
MEASURING METHOD OF CONCENTRATION OF MOLECULAR CONTAMINATION AND MEASURING APPARATUS THEREFOR
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机译：分子污染浓度的测定方法及其测定装置
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摘要
PROBLEM TO BE SOLVED: To facilitate the control of molecular contamination, for example, in a clean room with the accurate specification of the cause of generating molecular contamination, by permitting continuous observation of the sequence of changes in the concentration of molecular contamination and those in the composition occurring ceaselessly in the clean room, concerning a measuring method of the concentration of molecular contamination and a measuring apparatus therefor.;SOLUTION: In the measuring method of the concentration of molecular contamination, a voltage with an arbitrary frequency is applied to or swept to a sensor with an electrode provided on a thin crystal piece having piezoelectric effects, and the quantity of trace substances adsorbing on the sensor under the gaseous phase measured from changes in the resonance characteristics of the sensor, in the characteristic of generating surface waves and in the propagation characteristics of the surface waves. A plurality of sensors varied in the measuring frequency, in the vibration mode or in the propagation mode of the surface waves are arranged in proximity in the area where the trace substances under the gaseous phase is observed, and differences between the results of the observation of the sensors are analyzed using a required calculation means to determine the quantity of the trace substances adsorbing on the surfaces of the sensors under the gaseous phase.;COPYRIGHT: (C)2003,JPO
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