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ATMOSPHERIC PRESSURE PLASMA TREATING DEVICE, ATMOSPHERIC PRESSURE PLASMA TREATING METHOD AND ELECTRODE SYSTEM FOR ATMOSPHERIC PRESSURE PLASMA TREATING DEVICE
ATMOSPHERIC PRESSURE PLASMA TREATING DEVICE, ATMOSPHERIC PRESSURE PLASMA TREATING METHOD AND ELECTRODE SYSTEM FOR ATMOSPHERIC PRESSURE PLASMA TREATING DEVICE
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机译：大气等离子处理装置，大气等离子处理方法及电极系统
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摘要
PROBLEM TO BE SOLVED: To provide an atmospheric pressure plasma treating device and an atmospheric pressure plasma treating method which enable surface treatment of various shapes of base materials to be executed, are excellent in surface treating capacity to the base material and are excellent in productivity at a low cost. ;SOLUTION: The atmospheric pressure plasma treating device has a means for generating an excited inactive gas by exciting an inactive gas and a means for changing a reactive gas to plasma by bringing the excited inactive gas into contact with the reactive gas and surface treatment of the base material is executed by bringing the plasma of the reactive gas into contact with the surface of the base material. The atmospheric pressure plasma treating device is characterized by bringing the excited inactive gas into contact with the reactive gas so as to hold the reactive gas therebetween or wrap the reactive gas therein.;COPYRIGHT: (C)2003,JPO
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