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RECIPROCITY FAILURE EVALUATING METHOD FOR PHOTORECEPTOR
RECIPROCITY FAILURE EVALUATING METHOD FOR PHOTORECEPTOR
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机译:光敏电阻的可靠性失效评估方法
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摘要
PROBLEM TO BE SOLVED: To provide a reciprocity failure evaluating method for a photoreceptor for evaluating a proper photoreceptor to a multi-beam scanning exposure optical system.;SOLUTION: In the reciprocity failure evaluating method for the photoreceptor, respective potentials of a photoreceptor to exposure energy after multi-beam simultaneous exposure of an exposure pattern and sequential exposure between multi-beam scanning exposure processes are measured and compared with each other and it is evaluated whether the photoreceptor as a body to be inspected has a reciprocity failure according to the comparison result.;COPYRIGHT: (C)2003,JPO
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