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Transmitted hole formation manner of the optical propagation body probe and the scanning-type probe microscope null which possesses transmitted hole
Transmitted hole formation manner of the optical propagation body probe and the scanning-type probe microscope null which possesses transmitted hole
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机译：具有透射孔的光学传播体探头和扫描式探头显微镜的透射孔形成方式
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摘要
PURPOSE: To obtain the scanning probe microscope which forms a through hole easily without damaging the tip of a probe and whose resolution is enhanced. ;CONSTITUTION: A metal film coating 2 is formed on the tip part including the through hole part of an optical fiber 1 which has been made sharp, the tip is brought into contact with a conductor substrate 3, and a voltage is applied across a probe and the conductor substrate 3 by a voltage source 4. At this time, the metal film coating on the through hole part is removed by a shock, generated heat or oxidation due to an arc discharge in a very small part between the tip of the probe and the conductor substrate 3, and a through hole is formed. As the waveform of the voltage which is applied across the probe and the conductor substrate 3, a direct current, an alternating current, a pulse, a lamp or the like can be used.;COPYRIGHT: (C)1995,JPO
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