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Production manner null of hydroxide fourth class ammonium
Production manner null of hydroxide fourth class ammonium
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机译：氢氧化物第四级铵的生产方式无效
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摘要
PURPOSE: To produce an aqueous solution of high-purity quaternary ammonium hydroxide free from halide ion and organic acid ion in high efficiency at a low cost. ;CONSTITUTION: An organic acid quaternary ammonium salt of the formula [N(R)4]+.X- (R is 1-3C alkyl; X is organic acid having carboxyl group) is reacted with oxygen or an oxygen-containing gas at 10-200°C (preferably 20-150°C) in the presence of a platinum group catalyst (preferably a catalyst obtained by supporting 0.05-10wt.% of palladium on a carbon material) to synthesize an inorganic acid quaternary ammonium salt. An aqueous solution of the inorganic acid salt is electrolyzed by using an electrolytic cell having an ion exchange membrane as the diaphragm to obtain an aqueous solution of quaternary ammonium hydroxide. The aqueous solution can be used as a developing liquid for a positive resist and a cleaning liquid for substrate, etc., in the production of LSI and LCD or for the production of polymerization catalyst for polycarbonate resin, zeolite catalyst, etc.;COPYRIGHT: (C)1994,JPO
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