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Gas injector with a ceramic material block with gas injection holes, which extend through it, and a plasma containing the gas injector
Gas injector with a ceramic material block with gas injection holes, which extend through it, and a plasma containing the gas injector
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机译：带有陶瓷材料块的注气器，该注料器具有穿过其延伸的注气孔和包含注气器的等离子体
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摘要
A gas injector is constructed in such a manner in order to allow for the conditions within a half conductor preparation device to be able to better withstand, such as, for example, a plasma etching apparatus. The gas injector includes a body in the form of a ceramic material block and a gas injection section, the by first and second gas injection holes is formed, which extends through the ceramic material block extend. The ceramic material block has a first cylindrical section and a second cylindrical section, extending from the first cylindrical section extends from. The first cylindrical section is wider or further and longer than the second cylindrical section. The first holes of the gas injection section extend through the first cylindrical section of the ceramic material block, while the second holes through the second cylindrical section and, closely in the case of each of the or of a respective one of the first holes, and which are concentric with respect to these. The first holes are also further and longer than the second holes. The gas injector is connected to an upper portion of a plasma etching apparatus.
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