TRIPLE ELECTRODE MOEMS TUNABLE FILTER AND FABRICATION PROCESS THEREFOR

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  机译： 三电极moems可调滤波器及其制造工艺

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  机译： 三电极可调谐滤光片及其制造工艺

• 5. Triple electrode MOEMS tunable filter and fabrication process therefor [P] . 美国专利： US2002080504A1 . 2002-06-27

  机译： 三电极moems可调滤波器及其制造工艺

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