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Optomechanical microdevice and optomechanical microdeflector using the same
Optomechanical microdevice and optomechanical microdeflector using the same
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机译:光学机械微器件和使用该光学机械微器件的光学机械微偏转器
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摘要
The device has a fixed part or substrate (2) whose surface (3) defines the plane (x,y) in which its moving part can be actuated to deflect a beam of light. The microlens (4) is attached to the fixed part by preferably two arms (6,8) which can be displaced in the y direction by means of pairs of electrodes (12,14;16,18). The beam is introduced through a micro-waveguide (10) in the x direction. The displacement can be effected alternatively by a magnetic field perpendicular to the plane, exerting a Laplacian force on conductors of current along the arms.
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