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SHAPE-ERROR EVALUATION METHOD FOR SCANNING LENS OR SCANNING-LENS MOLD, AND WORKING METHOD FOR THE SCANNING LENS OR THE SCANNING-LENS MOLD AND SCANNING LENS OR SCANNING-LENS MOLD
SHAPE-ERROR EVALUATION METHOD FOR SCANNING LENS OR SCANNING-LENS MOLD, AND WORKING METHOD FOR THE SCANNING LENS OR THE SCANNING-LENS MOLD AND SCANNING LENS OR SCANNING-LENS MOLD
PROBLEM TO BE SOLVED: To provide an evaluation method for shape error of a scanning lens or a scanning- lens mold, where a working error which is minimum and necessary and sufficient for ensuring the function of a component as the scanning lens is evaluated, and the scanning lens can be worked with high accuracy and with high efficiency.;SOLUTION: As a basis for performing a correction working operation, in which the optical performance of the scanning lens is brought close to design specification values, the lens- molding face 2a of the scanning-lens mold 2 is measured, and error amount with reference to a design shape is evaluated and calculated. Its measurement is performed at least once in a length, which contains the optical effective region Ai of the face 2a and in the main scanning direction of a beam with which the manufactured scanning lens is irradiated. Its measurement is performed at least twice in the sub-scanning direction at a pitch interval Px with a relation PxDx/2, when a pitch interval in the main scanning direction is designated as Px and the diameter in the main scanning direction of a beam profile 3 on the scanning lens is designated as Dx. The cross-sectional curve of the lens molding face 2a is fetched. Consequently, working errors which are minimum, necessary and sufficient for ensuring the function of a component as the scanning lens are evaluated, and the scanning lens is worked with high accuracy and with high efficiency.;COPYRIGHT: (C)2002,JPO
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