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ETCHING APPARATUS AND ETCHING METHOD THEREWITH
ETCHING APPARATUS AND ETCHING METHOD THEREWITH
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机译：配乐装置及其配乐方法
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摘要
PROBLEM TO BE SOLVED: To provide an etching apparatus having a transporting means for transporting a metal sheet as a workpiece and an etching nozzle for spraying an etching liquid to the metal sheet, which can etch very anisotropically with little uneveness even if the workpiece is large, and to provide a method therewith.;SOLUTION: The etching apparatus is characterized by etching nozzles which are arranged so as not to overlap formed spray patterns on the above metal sheet each other.;COPYRIGHT: (C)2002,JPO
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