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MEASURING METHOD AND DEVICE FOR LEAKAGE GAS AND EVALUATION DEVICE OF THE LEAKAGE GAS MEASURING DEVICE
MEASURING METHOD AND DEVICE FOR LEAKAGE GAS AND EVALUATION DEVICE OF THE LEAKAGE GAS MEASURING DEVICE
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机译：泄漏气体的测量方法，装置及泄漏气体测量装置的评估装置
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摘要
PROBLEM TO BE SOLVED: To provide a measuring method for accurately measuring the small flow rate of leakage gas. SOLUTION: In the leakage gas measuring method for measuring the gas quantity leaking out of an inspection object S1 having a nearly closed space wherein helium gas is sealed, a process exhausting a chamber by way of a first exhaust pipe 12 connected with the chamber 11 containing the inspection object, a process for accumulating the gas leaking out of the inspection object into the chamber by closing the chamber for a specific time TS, a process for measuring the total amount LS of the gas by supplying the gas accumulated in the chamber after elapsing for the specific time to a mass spectrometer 21, and a process calculating the leakage gas flow rate Lout by dividing the total amount LS of the measured gas by the specific time TS are contained.
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