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STATIC ELECTRICITY EVALUATION SUBSTRATE FOR PLANAR DISPLAY ELEMENT MANUFACTURING DEVICE AND STATIC ELECTRICITY EVALUATION METHOD FOR PLANAR DISPLAY ELEMENT MANUFACTURING DEVICE
STATIC ELECTRICITY EVALUATION SUBSTRATE FOR PLANAR DISPLAY ELEMENT MANUFACTURING DEVICE AND STATIC ELECTRICITY EVALUATION METHOD FOR PLANAR DISPLAY ELEMENT MANUFACTURING DEVICE
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机译：平面显示元件制造装置的静电评估基板及平面显示元件制造装置的静电评估方法
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摘要
PROBLEM TO BE SOLVED: To prevent defects due to static electricity generated at the time of manufacturing a planar display element, to improve the display quality even for a large-sized, high definition and high image quality planar display element and to reduce costs by improving a manufacture yield.;SOLUTION: A static electricity evaluation substrate 10 composed by enclosing a liquid crystal composition 18 in a gap surrounded by a sealing agent 17 between first and second transparent glass plates 11 and 12 composed by oppositely arranging alignment layers 14 and 16 in the almost same size as a liquid crystal display element to be actually manufactured is made to flow along the manufacturing process of a planar display element manufacturing device. The change of light transmissivity on the static electricity evaluation substrate 10 generated by the static electricity generated at the time of making it flow is observed, the generation condition of the static electricity in the manufacturing process is accurately recognized and appropriate measures against the static electricity are taken.;COPYRIGHT: (C)2002,JPO
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