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SCANNING NONLINEAR PERMITTIVITY MICROSCOPE FOR MEASURING HIGHER ORDER NONLINEAR PERMITTIVITY
SCANNING NONLINEAR PERMITTIVITY MICROSCOPE FOR MEASURING HIGHER ORDER NONLINEAR PERMITTIVITY
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机译：扫描非线性介电常数显微镜以测量更高阶的非线性介电常数
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摘要
PROBLEM TO BE SOLVED: To develop and provide a new nonlinear permittivity microscope for measuring a order nonlinear permittivity higher than that by a conventional nonlinear permittivity microscope, based on knowledge in which the concentration degree directly under a probe becomes higher order in the nonlinear permittivity becoming higher order and having superior resolution. SOLUTION: The scanning nonlinear permittivity microscope separately does not measure conventional tertiary nonlinear permittivity but rather a higher order nonlinear permittivity, when the microscope measures a capacity which is changing according to an alternating electric field of a lower frequency to be applied between the probe contacted with the surface of a sample and the back surface of the sample, and detects the information of a narrower region in a planer region and a depth region manner by using a probe, having the smaller radius of the distal end of the probe. Thus, an image of high resolution can be obtained.
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