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Gas dissolved water production apparatus and gas-dissolved water method for manufacturing the same, and cleaning equipment
Gas dissolved water production apparatus and gas-dissolved water method for manufacturing the same, and cleaning equipment
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机译：气体溶解水生产设备及其制造方法和清洁设备
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摘要
PROBLEM TO BE SOLVED: To shorten startup time and reduce gas consumption and solvents by a simple device configuration.;SOLUTION: This ozone water producing device 1 is provided with a gas dissolving module 3 which brings ozone gas into contact with pure water to generate ozone water, gas introducing piping 4 which feeds ozone gas from an ozone gas generator 2 to the gas dissolving module 3, a buffer 5 which is connected to the middle of the gas introducing piping 4 and discharges the ozone gas toward the gas introducing piping 4 after temporally storing the ozone gas, a first valve 6 which opens and closes the gas introducing piping 4 to switch the introduction and the stop of the gas supplied to the gas dissolving module 3, and a check valve 7 which prevents the backflow of the storage gas discharged from the buffer 5.;COPYRIGHT: (C)2001,JPO
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