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Optical component for polarization modulation, a mueller polarimeter and ellipsometer containing such an optical component, a process for the calibration of this ellipsometer, and an ellipsometric measurement process
Optical component for polarization modulation, a mueller polarimeter and ellipsometer containing such an optical component, a process for the calibration of this ellipsometer, and an ellipsometric measurement process
An optical component for modulation of polarization, a Mueller polarimeter and ellipsometer containing such an optical component. The optical component modulates a linearly polarized incident beam and returns a modulated beam. It includes a coupled phase modulator which modulates the incident beam twice in succession, the two modulations having the same frequency of &ohgr;/2&pgr;, and a coupling system modifying the polarization state of the light between the two modulations. The ellipsometer includes the means for detection of a measurement beam returned by a sample, which receives the modulated beam, in addition to a processing unit. The means of detection include a polarimeter producing n measured quantities representing the polarization states of the beam, and the processing unit produces m values for each of these quantities by Fourier transform, with n×m≧16 and m≧4, providing simultaneous access to the sixteen components of the Mueller matrix of the sample.
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