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Vertical conveying apparatus, continuous furnace having such a vertical conveying apparatus, and carrier therefor
Vertical conveying apparatus, continuous furnace having such a vertical conveying apparatus, and carrier therefor
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机译：垂直输送设备，具有这种垂直输送设备的连续炉及其载体
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摘要
A vertical conveying apparatus is used particularly advantageously in a vertical continuous furnace, for example, in semiconductor production. Since rubbing contacts are avoided and there is thus barely any wear, continuous furnaces provided therewith are particularly suitable for the sensitive semiconductor products and production processes. Since no lateral guides are necessary for the specially designed carriers in the case of relatively small and average stack heights, there is no rubbing contact in the furnace region either, and wear is thus completely avoided. Furthermore, the invention is distinguished by its mechanical simplicity, which has advantages, in particular as far as durability and maintenance are concerned. The absence of retaining or transporting beams in the furnace region makes it possible to achieve a wide variety of different temperature zones over the vertical height of the stack. Heat losses as a result of the retaining and transporting beams passing through the different heating and temperature zones do not occur. Likewise, the absence of retaining and transporting beams has the benefit that the hot air from the fan heaters cannot be covered over and this arrangement has a positive effect on the temperature homogeneity.
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