首页>
外国专利>
Process controller e.g. for semiconductor manufacture, selects item to be processed from number of items based on performance of processing device evaluated by evaluation unit and characteristics of items
Process controller e.g. for semiconductor manufacture, selects item to be processed from number of items based on performance of processing device evaluated by evaluation unit and characteristics of items
The process controller has an evaluation unit for evaluating the performance of a processing device based on the processing result for the product processed by the device. An item selection unit selects an item to be processed from a number of items based on the performance of the processing device evaluated by the evaluation unit and the characteristics of the items.
展开▼
