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Adaptive mask engineering for inspecting defects uses an algorithm to generate a two-dimensional scatter diagram by plotting grey grades of pixels from a test image in contrast to grey grades of pixels from a reference image.
Adaptive mask engineering for inspecting defects uses an algorithm to generate a two-dimensional scatter diagram by plotting grey grades of pixels from a test image in contrast to grey grades of pixels from a reference image.
A two-dimensional scatter diagram is generated by plotting grey grades of pixels from a test image in contrast to grey grades of corresponding pixels from a reference image. A noise suppression filter is applied to the scatter diagram in order to define a mask form that can be deduced and completed to form a mask. Defect pixels are identified in the test image and corresponding pixel grey values are compared with the mask.
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