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Non-volatile ferroelectric memory comprises partial word lines, bit lines that cut the partial word lines, source/drain impurity regions formed on both sides of the word lines, and ferroelectric capacitors
Non-volatile ferroelectric memory comprises partial word lines, bit lines that cut the partial word lines, source/drain impurity regions formed on both sides of the word lines, and ferroelectric capacitors
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机译:非易失性铁电存储器包括部分字线,切割部分字线的位线,形成在字线两侧的源/漏杂质区和铁电电容器
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摘要
Non-volatile ferroelectric memory comprises partial word lines (SWL1, SWL2) formed at intervals in one direction; bit lines (B/L1, B/L2) that cut the partial word lines; source/drain impurity regions formed on both sides of the word lines; a first ferroelectric capacitor (FC1); and a second ferroelectric capacitor (FC2). An Independent claim is also included for a non-volatile ferroelectric memory. Preferred Features: The first drain impurity region and the second drain impurity region are electrically connected to the bit lines via a first contact stop layer and as second contact stop layer.
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