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High resolved position measurement arrangement for light spot on charge coupled device sensor, has wedge plate moved between laser diode and sensor to change refraction spot of laser light on sensor
High resolved position measurement arrangement for light spot on charge coupled device sensor, has wedge plate moved between laser diode and sensor to change refraction spot of laser light on sensor
A wedge plate (1b) is moved on the measurement path (1g) between laser diode (1a) with collimator (1d) and CCD sensor (1c) so as to change refraction spot of laser light on CCD sensor. An Independent claim is also included for light spot position measurement procedure.
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