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Temperature compensated microsystem part working table, for micro-hardness tester, has gap between insulation, temperature control device preventing heat transfer between specimen holder and working plate
Temperature compensated microsystem part working table, for micro-hardness tester, has gap between insulation, temperature control device preventing heat transfer between specimen holder and working plate
The working table has a temperature control device and insulation attached to a working table plate by suspension devices. An expansion gap is arranged between the temperature control device and the insulation so that no heat transfer occurs between a specimen holder and the working plate. The working table (1) has a working table plate (2), a base plate (3) and a housing wall (4), a temperature control device (7) with a heat exchanger (8), a cooling cell (9) and a heating cartridge container (13), thermal insulation (14) enclosing the temperature control device and a specimen holder (17) for insertion into a recess in the heat exchanger via an opening in the working table plate. The temperature control device and insulation are attached to the plate by suspension devices (6,15). An expansion gap (16) is arranged between the temperature control device and the insulation so that no heat transfer occurs between the specimen holder and the working plate. Independent claims are also included for the following: a use of a working table in micro-hardness testers.
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