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- micro-mirror device driving electrostatically and optical pick-up system using the same
- micro-mirror device driving electrostatically and optical pick-up system using the same
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机译：-静电驱动微镜装置以及使用该微镜装置的光学拾取系统
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摘要
The optical data storage device (optical data storage) recording and / or to the for input optical reproducing fine adjust electrostatic drive type micro-that the-present invention relates to an optical pickup apparatus using the mirror element and him, and the substrate and is formed on a substrate a plurality of grooves consists of a groove corresponding to the internal electrode in accordance with the fixed portion, and the externally applied voltage having a protrusion having a reciprocating up and down by the driving electrode portion located on the upper fixed electrode portion, a mirror that is formed on the driving electrode portion. Here, the driving electrode portion to one side of the resilient suspension (suspension) and the mirror plate and the mirror plate is supported by the elastic suspension is fixed to the respective form anchor (anchor) and the anchor is on both edges (edge) of the substrate It is formed to protrude respectively corresponding to the fixed-electrode-portion insertion groove part and is comprised of a plurality of electrodes that are moved into the groove under the application of an external voltage. Thus, the present invention consists is to improve the adjustment position input so used the actuator of electrostatic drive method of light accuracy and, it is possible to lower the power consumption, integrated, and the integration of the mirror with the actuator, so miniaturization and weight reduction of the size of the optical system.
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