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Nitriding process method and apparatus using plasma which forms hardening depth from metal surface by 1mm or more
Nitriding process method and apparatus using plasma which forms hardening depth from metal surface by 1mm or more
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机译：使用从金属表面形成硬化深度达1mm或更大的等离子体的氮化工艺方法和设备
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摘要
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a nitriding process technology using plasma. The present invention relates to a plasma nitriding process that can be applied to the hardening process of tool steels and machine parts that require a large surface load by forming a cure depth of 1 mm or more into which metal penetrates. It is an object of the present invention to provide a nitriding process method and an apparatus thereof. The present invention is configured for this purpose is the reaction temperature of the nitriding process applied to the metal material is heated to 600 ~ 700 ℃, the addition of sulfur (S) gas when the mixed gas is added, the pulse type negative voltage applied to the metal material 1 kV or more, while the addition of an induction plasma generation process to increase the plasma density in the reactor, the energy and the number of active neutral nitrogen particles and nitrogen radicals, which are metal and nitride activators, are increased and the number and surface of the metal material It is to increase the reaction action of. In addition, the mechanical configuration of the present invention is a reaction in which the ion nitriding reaction occurs, a sample stand on which metal materials are placed, a rotary pump for making the reactor in a vacuum state, a heater for raising the reaction temperature of the reaction furnace, a gas for introducing gas The input unit includes a pulse negative voltage generator for applying a pulsed negative voltage to the metal material, and an induction voltage generator for enabling an induction plasma generation process.
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