A METHOD OF OPERATING A DUAL CHAMBER REACTOR WITH NEUTRAL DENSITY DECOUPLED FROM ION DENSITY

• 1. 一种兼备高能量密度与高功率密度的钠离子电容器及其制备方法 [P] . 中国专利： CN108899211B . 2020.09.15
• 2. 一种高能量密度、高功率密度锂离子电池的制备方法 [P] . 中国专利： CN106602072B . 2019.04.23
• 3. Method of operating a dual chamber reactor with neutral density decoupled from ion density [P] . 美国专利： US6635578B1 . 2003-10-21

  机译： 中性密度与离子密度解耦的双室反应器的操作方法

• 4. A METHOD OF OPERATING A DUAL CHAMBER REACTOR WITH NEUTRAL DENSITY DECOUPLED FROM ION DENSITY [P] . 世界知识产权组织专利： WO0180290A3 . 2002-04-04

  机译： 一种从离子密度解耦中性密度的双室反应器的方法

• 5. Method of operating a plasma reactor chamber with respect to two plasma parameters selected from a group comprising ion density, wafer voltage, etch rate and wafer current, by controlling chamber parameters of source power and bias power [P] . 美国专利： US7521370B2 . 2009-04-21

  机译： 通过控制源功率和偏置功率的腔室参数，相对于选自离子密度，晶片电压，蚀刻速率和晶片电流的两个等离子体参数操作等离子体反应器腔室的方法

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