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MEASUREMENT METHOD AND CORRECTION METHOD OF THE DEVIATION OF ELECTRON BEAM SCANNING AXIS WITH STAGE MOVING AXIS AND STAGE MOVING ERROR IN SCANNING ELECTRON MICROSCOPE
MEASUREMENT METHOD AND CORRECTION METHOD OF THE DEVIATION OF ELECTRON BEAM SCANNING AXIS WITH STAGE MOVING AXIS AND STAGE MOVING ERROR IN SCANNING ELECTRON MICROSCOPE
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机译：电子束扫描轴与级动轴的偏离的测量方法和校正方法以及扫描电子显微镜中级动误差
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摘要
PROBLEM TO BE SOLVED: To measure the deviation of an electron beam scanning axis with a stage moving axis of a scanning electron microscope.;SOLUTION: An arithmetic circuitry 17 for a picture error amount finds the error in the X-axis direction and the Y-axis direction of two-sheet pictures, an arithmetic circuitry 18 for a movement error finds the error of the state movement amount and an arithmetic circuitry 19 for a rotation error amount finds the errors in the X-axis and the Y-axis of the stage and the rotation direction in the X-axis and the Y-axis of electron beam, based on the picture data obtained before and after the movement of the stage.;COPYRIGHT: (C)2001,JPO
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