PROBLEM TO BE SOLVED: To provide a sample surface deposit inspection system, a deposit elimination system and a deposit sticking system capable of easily detecting deposit even on a rugged sample surface and efficiently eliminating static electric charge to eliminate the deposit from a base. ;SOLUTION: An ultraviolet light source 12 irradiates ultraviolet rays from every angle including the surface and back face of a solid or liquid sample. An optical system 13 converges the ultraviolet rays directly or through a lens or the like to irradiate the sample. An optical mechanism 13 has a measuring mechanism for recording the in-plane distributed image of fluorescent intensity radiated from the sample surface after the irradiation of ultraviolet rays, by an image pickup apparatus or the like, and a magnifying mechanism for the detection of the radiated fluorescence from the local part of the sample surface through a microscope, and guides the radiated fluorescence into a spectroscope 11. A moving mechanism can move these sample stage and observation system precisely in a wide range.;COPYRIGHT: (C)2001,JPO
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