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LOCALLY DEGENERATE SEMICONDUCTOR YBCO ELEMENT USING AFM CHIP, SUPERCONDUCTOR YBCO ELEMENT, AND MANUFACTURING METHOD THEREOF
LOCALLY DEGENERATE SEMICONDUCTOR YBCO ELEMENT USING AFM CHIP, SUPERCONDUCTOR YBCO ELEMENT, AND MANUFACTURING METHOD THEREOF
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机译：使用AFM芯片，超导体YBCO元素局部退化的YBCO元素及其制造方法
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摘要
PROBLEM TO BE SOLVED: To provide a locally degenerated semiconductor YBCO element, using AFM, a superconductor YBCO element, and a manufacturing method thereof, in which a semiconductor YBCO thin film is locally degenerated to an insulator by use of an AFM chip, or a superconductor YBCO film is locally degenerated into a non-superconductor.;SOLUTION: In a locally degenerated semiconductor YBCO element using an AFM chip, and a method for manufacturing a locally degenerate superconductor YBCO element, a voltage is applied to a local region of a semiconductor YBCO channel or a superconductor YBCO channel by use of the AFM chip to form an insulator YBCO region or a non-superconductor YBCO region, whereby a tunnel junction is formed without a patterning process through photolithography, and a fining process, such as dry-and/or wet-etching, etc.;COPYRIGHT: (C)2001,JPO
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