Crystal distortion measuring apparatus and crystal distortion measurement method
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机译：晶体畸变测定装置及晶体畸变测定方法
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摘要
PROBLEM TO BE SOLVED: To measure a crystal strain in a very small region inside a semiconductor crystal. ;SOLUTION: An He-Ne laser 1 which is installed in such a way that the recording face of a negative film 2 on which the transmission electron microscope image of a semiconductor crystal as a sample is recorded is irradiated with a laser beam vertically is provided. A semitransparent plane screen 3 onto which a diffraction image generated at a time when the laser beam is transmitted through the transmission electron microscope image recorded on the negative film 2 is projected is provided. A CCD camera 4 which images the projected diffraction image is provided. A computer 5, for measurement and control, which scans the irradiation position of the laser beam, which fetches imaged image data from the, CCD camera 4 in synchronization with a scanning operation which measures the position or the intensity of a diffraction spot on the diffraction image on the basis of the imaged image data and which maps the relationship of the position of the diffraction spot or the intensity of the refraction spot with the every irradiation position is provided.;COPYRIGHT: (C)2000,JPO
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