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RAW MATERIAL SOLUTION FOR FORMING PEROVSKITE-TYPE OXIDE THIN FILM, METHOD FOR FORMING PEROVSKITE-TYPE OXIDE THIN FILM AND PEROVSKITE-TYPE OXIDE THIN FILM
RAW MATERIAL SOLUTION FOR FORMING PEROVSKITE-TYPE OXIDE THIN FILM, METHOD FOR FORMING PEROVSKITE-TYPE OXIDE THIN FILM AND PEROVSKITE-TYPE OXIDE THIN FILM
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机译:钙钛矿型氧化物薄膜的原料制备方法,钙钛矿型氧化物薄膜和钙钛矿型氧化物薄膜的制备方法
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摘要
PROBLEM TO BE SOLVED: To obtain a solution having high aging stability and oxidation property of formed film and free from striation defect after coating by including a silicone in a raw material solution for forming a perovskite-type oxide thin film containing Pb. ;SOLUTION: A silicone is added to a solution of a raw material for forming a Pb-containing perovskite-type oxide thin film (e.g. lead titanate zirconate thin film). The silicone is preferably one or more oils selected from dimethyl silicone oil, methyl phenyl silicone oil and methyl hydrogen silicone oil and its content is ≤1,000 ppm, preferably 1-100 ppm. The solvent for the oxide material is ethanol, acetone, dimethyl ether, etc., the raw material is doped with a doping element such as Ca, Sr and Ba at an atomic ratio of about ≤0.1 and acetylacetone, etc., are used as a stabilizer.;COPYRIGHT: (C)2001,JPO
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